SEMICONDUCTOR PHYSICS LABORATORY, INC.
Patent Owner
Stats
- 16 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Apr 22, 2008 most recent publication
Details
- 16 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 610 Total Citation Count
- Apr 24, 1996 Earliest Filing
- 14 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
7190458 Use of scanning beam for differential evaluation of adjacent regions for change in reflectivityDec 09, 03Mar 13, 07[G01N]
7136163 Differential evaluation of adjacent regions for change in reflectivityDec 09, 03Nov 14, 06[G01J]
7130055 Use of coefficient of a power curve to evaluate a semiconductor waferOct 29, 04Oct 31, 06[G01B]
6885458 Apparatus and method for determining the active dopant profile in a semiconductor waferAug 19, 02Apr 26, 05[G01B]
6812717 Use of a coefficient of a power curve to evaluate a semiconductor waferMar 05, 01Nov 02, 04[G01N, G01R]
6483594 Apparatus and method for determining the active dopant profile in a semiconductor waferNov 26, 01Nov 19, 02[G01B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7362108 Method and system for measurement of sidewall damage in etched dielectric structures using a near field microwave probeExpiredOct 14, 05Apr 22, 08[G01R]
7285963 Method and system for measurement of dielectric constant of thin films using a near field microwave probeExpiredApr 08, 05Oct 23, 07[H01P]
7282941 Method of measuring semiconductor wafers with an oxide enhanced probeExpiredApr 05, 05Oct 16, 07[G01R]
7102363 Method and system for non-contact measurement of microwave capacitance of miniature structures of integrated circuitsExpiredMay 26, 05Sep 05, 06[G01R]
7063992 Semiconductor substrate surface preparation using high temperature convection heatingExpiredAug 08, 03Jun 20, 06[H01L]
6991948 Method of electrical characterization of a silicon-on-insulator (SOI) waferExpiredNov 05, 03Jan 31, 06[H01L]
6856140 System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probesExpiredApr 14, 03Feb 15, 05[G01R]
6842029 Non-invasive electrical measurement of semiconductor wafersExpiredApr 11, 02Jan 11, 05[G01R]
6741093 Method of determining one or more properties of a semiconductor waferExpiredMar 18, 02May 25, 04[G01R]
6657454 High speed threshold voltage and average surface doping measurementsExpiredMar 15, 02Dec 02, 03[G01R]
6632691 Apparatus and method for determining doping concentration of a semiconductor waferExpiredApr 11, 02Oct 14, 03[G01R]
6597185 Apparatus for localized measurements of complex permittivity of a materialExpiredSep 20, 00Jul 22, 03[G01N, G01R]
6492827 Non-invasive electrical measurement of semiconductor wafersExpiredOct 19, 00Dec 10, 02[G01R]
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