Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Gesellschaft m.b.H.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157
 
 
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 157

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5762391 Gripper for disk-shaped articlesApr 19, 96Jun 09, 98[B25J]
5513668 Support for disk-shaped articlesFeb 08, 94May 07, 96[B08B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
4903717 Support for slice-shaped articles and device for etching silicon wafers with such a supportExpiredNov 09, 88Feb 27, 90[B08B]

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