SILICON MICROSTRUCTURES, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01L MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE 1343
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 5357
 
  
 
B81B MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES 231

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0131,167 MANUFACTURING CATHETER SENSORSOct 17, 16May 11, 17[G01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9733139 Vertical membranes for pressure sensing applicationsMay 02, 14Aug 15, 17[G01L]
9399572 Microelectromechanical component and method for testing a microelectromechanical componentJan 27, 12Jul 26, 16[G01L, B81C, B81B]
8916944 Stress-sensitive micro-electromechanical device and use thereofMar 15, 11Dec 23, 14[H01L, B81B]
8866241 Pressure sensing device having contacts opposite a membraneNov 12, 12Oct 21, 14[H01L, B81C, B81B]
8820169 Compensation of stress effects on pressure sensor componentsMar 26, 13Sep 02, 14[G01L]
8402835 Compensation of stress effects on pressure sensor componentsFeb 16, 11Mar 26, 13[G01L]
8381596 CMOS compatible pressure sensor for low pressuresDec 17, 10Feb 26, 13[G01L]
8132465 Sensor element placement for package stress compensationJul 31, 08Mar 13, 12[G01L]
7487681 Pressure sensor adjustment using backside maskAug 06, 07Feb 10, 09[G01L]
7111518 Extremely low cost pressure sensor realized using deep reactive ion etchingSep 19, 03Sep 26, 06[G01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0178,467 PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANEAbandonedFeb 10, 16Jun 23, 16[G01L, B81B]
2016/0033,349 PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANEAbandonedFeb 13, 15Feb 04, 16[G01L, B81B]
2015/0198,496 PRESSURE TESTING WITH CONTROLLED APPLIED FLUIDAbandonedJan 15, 14Jul 16, 15[G01L]
2015/0143,926 AREA-EFFICIENT PRESSURE SENSING DEVICEAbandonedNov 23, 13May 28, 15[H01L, G01L]
2014/0260,650 SILICON PLATE IN PLASTIC PACKAGEAbandonedSep 10, 13Sep 18, 14[G01L]
2013/0008,255 TEMPERATURE EXTRACTION FROM A PRESSURE SENSORAbandonedDec 13, 11Jan 10, 13[G01L]
8082796 Temperature extraction from a pressure sensorExpiredJan 28, 09Dec 27, 11[G01L]
6467354 Anodically bonded, gas impervious cavity structures fabricated in siliconExpiredOct 23, 00Oct 22, 02[G01L]

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