SINGULUS TECHNOLOGIES GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5863399 Device for cathode sputteringApr 11, 97Jan 26, 99[C23C]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5879121 Substrate transporting apparatusExpiredFeb 18, 97Mar 09, 99[B65G]
5876082 Device for gripping and holding substratesExpiredFeb 18, 97Mar 02, 99[C23C, B23Q]
5863328 Device for surface coating or lacquering of substratesExpiredFeb 18, 97Jan 26, 99[B05C]
5800687 Device for masking or covering substratesExpiredApr 14, 97Sep 01, 98[C23C]
5766359 Device for surface coating or lacquering of substratesExpiredFeb 18, 97Jun 16, 98[B05C]
5259942 Device for transferring a workpiece into and out from a vacuum chamberExpiredJun 05, 92Nov 09, 93[C23C]
5118549 Optical recording mediumExpiredJul 17, 90Jun 02, 92[B32B]
5112469 Apparatus for the inward and outward transfer of a workpiece in a vacuum chamberExpiredAug 27, 90May 12, 92[C23C]
4956216 Optical recording mediumExpiredOct 24, 88Sep 11, 90[B32B]
4886592 Apparatus on the carousel principle for coating substratesExpiredMay 20, 88Dec 12, 89[C23C]

Top Inventors for This Owner

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