SIXTRON ADVANCED MATERIALS, INC.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2011/0146,787 SILICON CARBIDE-BASED ANTIREFLECTIVE COATINGAbandonedMay 28, 09Jun 23, 11[H01L, C09D, B32B]
2010/0186,811 Silicon Carbonitride Antireflective CoatingAbandonedAug 25, 09Jul 29, 10[H01L]
2010/0129,994 Method for forming a film on a substrateAbandonedFeb 27, 08May 27, 10[C23C, H01L, B65D]
2010/0051,096 SILICON CARBONITRIDE ANTIREFLECTIVE COATINGAbandonedNov 28, 08Mar 04, 10[H01L]
2009/0008,752 Ceramic Thin Film On Various Substrates, and Process for Producing SameAbandonedJul 07, 08Jan 08, 09[H01L, B32B]
7396563 Ceramic thin film on various substrates, and process for producing sameExpiredMay 23, 03Jul 08, 08[C23C]

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