SOKUDO CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B05B SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 163
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 144
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 186
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 166
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS198
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 196
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8851008 Parallel substrate treatment for a plurality of substrate treatment linesJun 27, 08Oct 07, 14[B05C, H01L, B05D, B05B]
8827621 Substrate processing apparatus, storage device, and method of transporting substrate storing containerMar 08, 11Sep 09, 14[B65G]
5289263 Apparatus for exposing periphery of an objectJan 14, 93Feb 22, 94[G03B, G01B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2010/0228,378 STOCKER APPARATUS AND SUBSTRATE TREATING APPARATUSAbandonedJan 26, 10Sep 09, 10[G06F]
2010/0081,097 SUBSTRATE PROCESSING APPARATUSAbandonedDec 11, 09Apr 01, 10[G03F]
2009/0275,149 METHODS AND SYSTEMS FOR CONTROLLING CRITICAL DIMENSIONS IN TRACK LITHOGRAPHY TOOLSAbandonedOct 30, 08Nov 05, 09[H01L]
2009/0253,078 DOUBLE EXPOSURE LITHOGRAPHY USING LOW TEMPERATURE OXIDE AND UV CURE PROCESSAbandonedMar 31, 09Oct 08, 09[G03B, G03F]
7567885 Method and system for determining object heightExpiredAug 23, 07Jul 28, 09[G06F]
2009/0179,366 APPARATUS FOR SUPPORTING A SUBSTRATE DURING SEMICONDUCTOR PROCESSING OPERATIONSAbandonedJan 16, 08Jul 16, 09[B25B]
2009/0165,711 SUBSTRATE TREATING APPARATUS WITH SUBSTRATE REORDERINGAbandonedDec 23, 08Jul 02, 09[B05C]
2009/0110,532 METHOD AND APPARATUS FOR PROVIDING WAFER CENTERING ON A TRACK LITHOGRAPHY TOOLAbandonedOct 29, 07Apr 30, 09[H01L, G05B, B65G, B25J]
2009/0107,519 METHOD AND SYSTEM FOR CHEMICALLY ENHANCED LASER TRIMMING OF SUBSTRATE EDGESAbandonedOct 30, 07Apr 30, 09[B08B]
2009/0109,595 METHOD AND SYSTEM FOR PERFORMING ELECTROSTATIC CHUCK CLAMPING IN TRACK LITHOGRAPHY TOOLSAbandonedOct 31, 07Apr 30, 09[H01L]
2009/0103,960 DEVELOPING APPARATUSAbandonedOct 15, 08Apr 23, 09[G03G]
7521915 Wafer bevel particle detectionExpiredApr 25, 06Apr 21, 09[G01R]
2009/0070,946 APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATEAbandonedSep 16, 08Mar 19, 09[B08B]
7500781 Method and apparatus for detecting substrate temperature in a track lithography toolExpiredOct 25, 07Mar 10, 09[G01K, H05B]
7497026 Method and system for detection of wafer centering in a track lithography toolExpiredJun 14, 07Mar 03, 09[H01L, G01B]
2009/0032,522 ZONE CONTROL HEATER PLATE FOR TRACK LITHOGRAPHY SYSTEMSAbandonedAug 15, 08Feb 05, 09[H05B]
2009/0023,297 METHOD AND APPARATUS FOR HMDS TREATMENT OF SUBSTRATE EDGESAbandonedJul 18, 07Jan 22, 09[H01L]
2009/0014,126 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHODAbandonedJul 09, 08Jan 15, 09[H01L, B05C, B08B]
2009/0001,071 Method and System for Cooling a Bake Plate in a Track Lithography ToolAbandonedJun 28, 07Jan 01, 09[H05B]
2008/0296,316 COAT/DEVELOP MODULE WITH SHARED DISPENSEAbandonedJun 09, 08Dec 04, 08[B05B, G01F]

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