SPTS TECHNOLOGIES LIMITED

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 4952
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 46316
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 15113
 
  
 
H05H PLASMA TECHNIQUE 822
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 531
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 384
 
  
 
B44C PRODUCING DECORATIVE EFFECTS 331
 
  
 
H02N ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR328
 
  
 
C25B ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON- METALS; APPARATUS THEREFOR 233
 
  
 
C25D PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING 249

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2016/0240,351 PLASMA PRODUCING APPARATUSFeb 05, 16Aug 18, 16[H01J, H01L]
2016/0148,787 PLASMA ETCHING APPARATUSNov 24, 15May 26, 16[H01J, C23C]
2015/0140,215 DURABLE CONFORMAL WEAR-RESISTANT CARBON-DOPED METAL OXIDE-COMPRISING COATINGNov 12, 14May 21, 15[C23C, C09D, C08K]
2015/0102,011 PLASMA ETCHING APPARATUSMay 23, 14Apr 16, 15[H01J, F16B]
2014/0352,889 APPARATUS FOR PROCESSING A SEMICONDUCTOR WORKPIECEMay 23, 14Dec 04, 14[H01L]
2013/0320,509 MOISTURE BARRIER COATINGSAug 05, 13Dec 05, 13[H01L]
2013/0312,663 Vapor Delivery ApparatusMay 22, 12Nov 28, 13[C23C, F17D]
2012/0244,715 HIGH-SELECTIVITY ETCHING SYSTEM AND METHODDec 02, 10Sep 27, 12[H01L, B05C, B44C]
2011/0318,502 METHODS OF DEPOSITING SIO2 FILMSDec 20, 10Dec 29, 11[C23C]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9903039 Electrochemical deposition chamberMar 18, 14Feb 27, 18[C25D, C25B, C25F]
9842772 Method of etchingApr 03, 15Dec 12, 17[H01J, H01L]
9803272 Deposition of silicon dioxideNov 04, 14Oct 31, 17[C23C, C01B]
9783886 PE-CVD apparatus and methodMar 09, 16Oct 10, 17[C23C, H01J]
9725805 Apparatus and method for controlled application of reactive vapors to produce thin films and coatingsJun 02, 06Aug 08, 17[C23C, B05D, B82Y]
9728432 Method of degassingNov 24, 15Aug 08, 17[H01L, F24C]
9719166 Method of supporting a workpiece during physical vapour depositionJun 20, 12Aug 01, 17[C23C, H01J]
9670574 Methods of depositing aluminium layersFeb 16, 12Jun 06, 17[C23C]
9640370 Etching apparatus and methodsMar 04, 14May 02, 17[H01J, H01L, B81C]
9601341 Method of etchingDec 19, 14Mar 21, 17[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0113,439 METHOD OF DEPOSITING AN AMORPHOUS SILICON FILMAbandonedOct 17, 13Apr 24, 14[H01L]
2011/0268,891 GAS DELIVERY DEVICEAbandonedJul 13, 09Nov 03, 11[C23C]
2011/0207,323 Method of forming and patterning conformal insulation layer in vias and etched structuresAbandonedFeb 25, 10Aug 25, 11[H01L]
2010/0187,202 METHOD OF PLASMA ETCHING AND CARRIERS FOR USE IN SUCH METHODSAbandonedJan 22, 10Jul 29, 10[H01L, B32B]
7399710 Method of controlling the pressure in a process chamberExpiredJun 13, 06Jul 15, 08[H01L]
6933246 Dielectric filmExpiredJun 13, 03Aug 23, 05[H01L]
5091049 High density plasma deposition and etching apparatusExpiredJun 29, 90Feb 25, 92[C23C, B05D, B44C]
4990229 High density plasma deposition and etching apparatusExpiredJun 13, 89Feb 05, 91[H01J]

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