SPUTTERED FILMS, INC.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5766426 Apparatus for, and method of, depositing a film on a substrateExpiredFeb 14, 95Jun 16, 98[C23C]
5310410 Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatusExpiredDec 13, 91May 10, 94[C23C]
5135634 Apparatus for depositing a thin layer of sputtered atoms on a memberExpiredFeb 14, 91Aug 04, 92[C23C]
5061360 Apparatus for depositing a thin film of a sputtered material on a memberExpiredJan 26, 90Oct 29, 91[C23C]
4523985 Wafer processing machineExpiredDec 22, 83Jun 18, 85[C23C]
4522697 Wafer processing machineExpiredDec 22, 83Jun 11, 85[C23C]

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