SPUTTERED FILMS, INC.
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 16, 1998 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 490 Total Citation Count
- Dec 22, 1983 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
Top Patents (by citation)
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
5766426 Apparatus for, and method of, depositing a film on a substrateExpiredFeb 14, 95Jun 16, 98[C23C]
5310410 Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatusExpiredDec 13, 91May 10, 94[C23C]
5135634 Apparatus for depositing a thin layer of sputtered atoms on a memberExpiredFeb 14, 91Aug 04, 92[C23C]
5061360 Apparatus for depositing a thin film of a sputtered material on a memberExpiredJan 26, 90Oct 29, 91[C23C]
Top Inventors for This Owner
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