STEAG AST ELECTRONIK GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 124
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 1110

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6449428 Gas driven rotating susceptor for rapid thermal processing (RTP) systemDec 11, 98Sep 10, 02[F27D]
6077751 Method of rapid thermal processing (RTP) of ion implanted siliconJan 29, 98Jun 20, 00[H01L]
6005226 Rapid thermal processing (RTP) system with gas driven rotating substrateNov 24, 97Dec 21, 99[H05B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6303520 Silicon oxynitride filmExpiredDec 15, 98Oct 16, 01[H01L]

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