STEAG RTP SYSTEMS

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
A21B BAKERS' OVENS; MACHINES OR EQUIPMENT FOR BAKING 118
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157
 
  
 
B30B PRESSES IN GENERAL; PRESSES NOT OTHERWISE PROVIDED FOR 121
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 124
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361
 
  
 
H03L AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES 179
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 1110

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6953338 Device for thermal treatment of substratesJan 19, 01Oct 11, 05[F27D]
6830631 Method for the removing of adsorbed molecules from a chamberSep 25, 02Dec 14, 04[B08B]
6222990 Heating element for heating the edges of wafers in thermal processing chambersDec 03, 97Apr 24, 01[A21B]
6100149 Method for rapid thermal processing (RTP) of silicon substratesJul 01, 97Aug 08, 00[H01L]
6076457 Rigid containers for transporting sachets of bio-pharmaceutical fluid productsAug 05, 98Jun 20, 00[B30B]
6051512 Apparatus and method for rapid thermal processing (RTP) of a plurality of semiconductor wafersApr 11, 97Apr 18, 00[H03L]
6005226 Rapid thermal processing (RTP) system with gas driven rotating substrateNov 24, 97Dec 21, 99[H05B]

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