SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 4683
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 9353
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 596
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 2157
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 244
 
  
 
A61N ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY 1106
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157
 
  
 
H01Q AERIALS 1109
 
  
 
H05H PLASMA TECHNIQUE 129

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9905397 Ion implantation apparatus and scanning waveform preparation methodMar 13, 17Feb 27, 18[H01J]
9837248 Ion implantation apparatus and method of controlling ion implantation apparatusJan 26, 15Dec 05, 17[H01J]
9666413 Ion implantation apparatus and control method for ion implantation apparatusJun 16, 15May 30, 17[H01J]
9659749 Beam extraction slit structure and ion sourceOct 16, 15May 23, 17[H01J]
9659755 Plasma generator and thermal electron emitterMay 16, 16May 23, 17[H01J]
9576771 High energy ion implanter, beam current adjuster, and beam current adjustment methodJan 14, 16Feb 21, 17[H01J]
9564289 Ion implanter and method of controlling the sameJul 07, 15Feb 07, 17[H01J]
9564292 Ion beam measuring device and method of measuring ion beamJun 25, 14Feb 07, 17[H01J]
9520265 Ion implantation apparatusDec 02, 14Dec 13, 16[H01J]
9502210 Ion implanter, ion implantation method, and beam measurement apparatusAug 07, 15Nov 22, 16[H01J]

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Expired/Abandoned/Withdrawn Patents

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