SURFACE TECHNOLOGY SYSTEMS PLC

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 7355
 
  
 
B44C PRODUCING DECORATIVE EFFECTS 331
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 299
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 234
 
  
 
H05H PLASMA TECHNIQUE 228
 
  
 
A61L METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION, OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICAL ARTICLES 170
 
  
 
B01J CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS 1108
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 192
 
  
 
F01N GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES 172
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1127

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

  • No Recent Publications to Display

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7491649 Plasma processing apparatusMar 16, 05Feb 17, 09[H01L]
7306745 Method and apparatus for stabilizing a plasmaApr 12, 00Dec 11, 07[B44C]
7141504 Method and apparatus for anisotropic etchingJul 23, 99Nov 28, 06[H01L]
6933242 Plasma etchingJun 21, 00Aug 23, 05[H01L]
6929784 Chlorotrifuorine gas generator systemMar 06, 00Aug 16, 05[B01J, A61L]
6926871 Gas generation systemMar 06, 00Aug 09, 05[F01N]
6628500 Method and apparatus for dechucking a substrate from an electrostatic chuckMar 29, 01Sep 30, 03[H01L, H02N]
6602384 Plasma processing apparatusJul 02, 01Aug 05, 03[C23C, H05H]
6602433 Gas delivery systemDec 18, 00Aug 05, 03[B44C]
6534922 Plasma processing apparatusJun 20, 01Mar 18, 03[C23F]

View all patents..

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2009/0139,658 PLASMA PROCESSING APPARATUSAbandonedJun 06, 07Jun 04, 09[C23C, C23F]
6894786 Process monitorExpiredJul 12, 99May 17, 05[H01L, G01B]
2002/0185,226 Plasma processing apparatusAbandonedJan 14, 02Dec 12, 02[C23C, C23F]

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.