SUSS MICROTEC LITHOGRAPHY GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 26336
 
  
 
B32B LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM14143
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 896
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 441
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 483
 
  
 
B23B TURNING; BORING 448
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 394
 
  
 
B29C SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING 2123
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS297
 
  
 
A01J MANUFACTURE OF DAIRY PRODUCTS 116

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2016/0336,212 APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRSMay 10, 16Nov 17, 16[H01L]
2016/0296,968 Method and Device for Applying a Coating to a SubstrateApr 08, 16Oct 13, 16[H01L, B05C, B05D]
2016/0291,480 Method for Regulating a Light Source of a Photolithography Exposure System and Exposure Assembly for a Photolithography DeviceMar 10, 16Oct 06, 16[G03F]
2016/0240,414 Chuck for Suction and Holding a WaferSep 26, 13Aug 18, 16[H01L]
2016/0148,823 BAKING DEVICE FOR A WAFER COATED WITH A COATING CONTAINING A SOLVENTNov 23, 15May 26, 16[H01L, F27D]
2016/0089,691 METHOD FOR COATING A SUBSTRATE AND COATING DEVICESep 22, 15Mar 31, 16[B05D, B05B]
2015/0251,396 METHOD AND APPARATUS FOR TEMPORARY BONDING OF ULTRA THIN WAFERSMay 18, 15Sep 10, 15[H01L, B32B]
2015/0206,783 SYSTEM AMD METHOD FOR SUBSTRATE HOLDINGJan 15, 15Jul 23, 15[H01L]
2014/0319,786 APPARATUS AND METHOD FOR ALIGNING AND CENTERING WAFERSJul 14, 14Oct 30, 14[H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9875917 Semiconductor bonding apparatus and related techniquesFeb 23, 17Jan 23, 18[H01L, B65G]
9864277 Method for regulating a light source of a photolithography exposure system and exposure assembly for a photolithography deviceMar 10, 16Jan 09, 18[G03B, G03F]
9859141 Apparatus and method for aligning and centering wafersJul 14, 14Jan 02, 18[H01L]
9837295 Apparatus and method for semiconductor wafer leveling, force balancing and contact sensingJul 14, 14Dec 05, 17[B23B, H01L]
9824909 Chuck, in particular for use in a mask alignerDec 04, 13Nov 21, 17[H01L, G03F]
9799554 Method for coating a substrateApr 08, 16Oct 24, 17[H01L]
9640418 Apparatus, system, and method for handling aligned wafer pairsMay 10, 16May 02, 17[H01L]
9583374 Debonding temporarily bonded semiconductor wafersJun 21, 16Feb 28, 17[H01L, B32B]
9472437 Debonding temporarily bonded semiconductor wafersDec 19, 14Oct 18, 16[H01L, B32B]
9458002 Bottle supply system and bottle cap adapterApr 09, 15Oct 04, 16[B05C, G03F, B67D]

View all patents..

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
8343300 Automated thermal slide debonderExpiredDec 22, 10Jan 01, 13[B24B, H01L, B29C, B65G, B65H, B32B, B66C]
8181688 Apparatus for temporary wafer bonding and debondingExpiredApr 15, 10May 22, 12[B32B]
2010/0264,566 RAPID FABRICATION OF A MICROELECTRONIC TEMPORARY SUPPORT FOR INORGANIC SUBSTRATESAbandonedMar 16, 10Oct 21, 10[B29C]
2010/0089,978 METHOD AND APPARATUS FOR WAFER BONDINGAbandonedJun 10, 09Apr 15, 10[B23K]
2006/0048,889 Method for connecting a chip and a substrateAbandonedMar 24, 05Mar 09, 06[B29C]
6966560 Device for fixing thin and flexible substratesExpiredJul 31, 03Nov 22, 05[B23B]
6829988 Nanoimprinting apparatus and methodExpiredMay 16, 03Dec 14, 04[B41F]

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