Semiconductor Systems, Inc.
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Aug 10, 1999 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 406 Total Citation Count
- Jun 26, 1992 Earliest Filing
- 11 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
5935768 Method of processing a substrate in a photolithography system utilizing a thermal process moduleExpiredJun 10, 97Aug 10, 99[G03F]
5885661 Droplet jet method for coating flat substrates with resist or similar materialsExpiredJul 26, 95Mar 23, 99[B05D, B05B]
5798140 Oscillatory chuck method and apparatus for coating flat substratesExpiredApr 30, 96Aug 25, 98[B05D]
5443348 Cassette input/output unit for semiconductor processing systemExpiredJul 16, 93Aug 22, 95[H01L]
5427820 Thermal control line for delivering liquid to a point of use in a photolithography systemExpiredJul 16, 93Jun 27, 95[B05C, B05B, B67D]
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