TEGAL CORPORATION
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- May 26, 2011 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 674 Total Citation Count
- Dec 12, 1980 Earliest Filing
- 22 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
Top Patents (by citation)
Upgrade to the Professional Level to View Top Patents for this Owner. Learn More |
Recent Publications
- No Recent Publications to Display
Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2011/0120,648 APPARATUS AND A METHOD FOR CONTROLLING THE DEPTH OF ETCHING DURING ALTERNATING PLASMA ETCHING OF SEMICONDUCTOR SUBSTRATESAbandonedFeb 02, 11May 26, 11[C23F]
2006/0186,496 System and method for processing a wafer including stop-on-alumina processingAbandonedApr 20, 06Aug 24, 06[H01L]
2006/0189,165 Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric filmsAbandonedMar 10, 06Aug 24, 06[H01L]
2006/0060,566 Method and device for substrate etching with very high power inductively coupled plasmaAbandonedJul 10, 03Mar 23, 06[H01L, C23F]
2006/0046,412 Method and system for sequential processing in a two-compartment chamberAbandonedMay 26, 05Mar 02, 06[H01L]
2006/0040,055 Method and system for sequential processing in a two-compartment chamberAbandonedJun 23, 05Feb 23, 06[C23C]
2005/0224,178 Heating jacket for plasma etching reactor, and etching method using sameAbandonedDec 03, 04Oct 13, 05[C23F]
2005/0084,619 Method to deposit an impermeable film on porous low-k dielectric filmAbandonedOct 12, 04Apr 21, 05[C23C, B05D]
2001/0001,413 METHOD AND APPARATUS FOR INCREASING WAFER THROUGHPUT BETWEEN CLEANINGS IN SEMICONDUCTOR PROCESSING REACTORSAbandonedMay 28, 98May 24, 01[H01L]
Top Inventors for This Owner
Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More |
We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!
We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.