TEL NEXX, INC.
Patent Owner
Stats
- 34 US PATENTS IN FORCE
- 2 US APPLICATIONS PENDING
- Dec 28, 2017 most recent publication
Details
- 34 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 631 Total Citation Count
- Apr 14, 1999 Earliest Filing
- 14 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2016/0071,703 Method for Increasing Adhesion of Copper to Polymeric SurfacesNov 17, 15Mar 10, 16[H01J, H01L]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9637836 Electrochemical deposition apparatus and methods for controlling the chemistry thereinJul 01, 14May 02, 17[C25D, C25C, C25B]
9303329 Electrochemical deposition apparatus with remote catholyte fluid managementNov 11, 13Apr 05, 16[C25D, H01L]
9257319 Parallel single substrate processing system with alignment features on a process section frameJun 04, 12Feb 09, 16[H01L]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2016/0365,317 METHOD AND APPARATUS FOR FORMING EMI SHIELDING LAYERS ON SEMICONDUCTOR PACKAGESAbandonedJun 13, 16Dec 15, 16[H01L]
2015/0090,599 Insoluble Anode With a Plurality of Switchable Conductive Elements Used to Control Current Density in a Plating BathAbandonedOct 02, 13Apr 02, 15[C25D]
2015/0047,674 METHOD AND APPARATUS FOR REMOVAL OF PHOTORESIST USING IMPROVED CHEMISTRYAbandonedAug 16, 13Feb 19, 15[H01L, B08B]
2015/0008,134 ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING THE CHEMISTRY THEREINAbandonedJul 01, 14Jan 08, 15[C25D]
2013/0213,816 Incorporating High-Purity Copper Deposit As Smoothing Step After Direct On-Barrier Plating To Improve Quality Of Deposited Nucleation Metal In Microscale FeaturesAbandonedMar 15, 13Aug 22, 13[C25D]
8420981 Apparatus for thermal processing with micro-environmentExpiredNov 13, 09Apr 16, 13[H01L, F27D]
2012/0305,192 PARALLEL SINGLE SUBSTRATE PROCESSING FLUID JET MODULEAbandonedJun 04, 12Dec 06, 12[C25D, B05B, B08B]
2012/0305,193 PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULEAbandonedJun 04, 12Dec 06, 12[C25D, B05C, B08B]
2012/0305,404 METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECEAbandonedApr 11, 12Dec 06, 12[C25D, C25B]
2005/0167,275 Method and apparatus for fluid processing a workpieceAbandonedOct 22, 04Aug 04, 05[C25D]
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