TENCOR INSTRUMENTS

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 22184
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS1089
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 375
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 3202
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 2157
 
  
 
G02F DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS 1132
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 1446

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6271916 Process and assembly for non-destructive surface inspectionsDec 20, 96Aug 07, 01[G01N]
5955661 Optical profilometer combined with stylus probe measurement deviceJan 06, 97Sep 21, 99[G01B]
5948972 Dual stage instrument for scanning a specimenOct 11, 96Sep 07, 99[G01B]
5883710 Scanning system for inspecting anomalies on surfacesJul 10, 95Mar 16, 99[239., G01N, 243.]
5866806 System for locating a feature of a surfaceOct 11, 96Feb 02, 99[G01N]
5864394 Surface inspection systemSep 29, 95Jan 26, 99[G01N]
5859424 Apodizing filter system useful for reducing spot size in optical measurements and other applicationsApr 08, 97Jan 12, 99[G01J]
5852232 Acoustic sensor as proximity detectorJan 02, 97Dec 22, 98[G01B]
5825482 Surface inspection system with misregistration error correction and adaptive illuminationApr 09, 97Oct 20, 98[G01N]
5798829 Single laser bright field and dark field system for detecting anomalies of a sampleMar 05, 96Aug 25, 98[G01N]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5168386 Flat field telecentric scannerExpiredOct 22, 90Dec 01, 92[G02B]
5133635 Method and apparatus for holding and conveying platelike substratesExpiredMay 21, 90Jul 28, 92[B25J]
5134303 Laser apparatus and method for measuring stress in a thin film using multiple wavelengthsExpiredAug 14, 90Jul 28, 92[G01N, G01B]
5108176 Method of calibrating scanners and arrangement for producing defined scattered light amplitudesExpiredMay 21, 90Apr 28, 92[G01N]
5092557 Apparatus for holding and positioning a substrate cassetteExpiredMay 21, 90Mar 03, 92[F16M]
5083035 Position location in surface scanning using interval timing between scan marks on test wafersExpiredJul 17, 90Jan 21, 92[G01N]
5076692 Particle detection on a patterned or bare wafer surfaceExpiredMay 31, 90Dec 31, 91[G01N]
5067805 Confocal scanning optical microscopeExpiredFeb 27, 90Nov 26, 91[G02B]
5026437 Cantilevered microtip manufacturing by ion implantation and etchingExpiredJan 22, 90Jun 25, 91[H01L]
5023424 Shock wave particle removal method and apparatusExpiredJan 22, 90Jun 11, 91[B23K]
4998019 Photoemission contaminant detectorExpiredOct 03, 89Mar 05, 91[G01N]
4988877 Via hole checkerExpiredOct 03, 89Jan 29, 91[G01F]
4967095 Method and apparatus for detecting and sizing particles on surfacesExpiredSep 25, 89Oct 30, 90[G01N]
4967381 Process control interface system for managing measurement dataExpiredJul 06, 89Oct 30, 90[G01R]
4965484 Vapor discharge lamp with gradient temperature controlExpiredMar 10, 89Oct 23, 90[H01J]
4951190 Multilevel menu and hierarchy for selecting items and performing tasks thereon in a computer systemExpiredJul 06, 89Aug 21, 90[G06F]
4945220 Autofocusing system for microscope having contrast detection meansExpiredNov 16, 88Jul 31, 90[G01J]
4907931 Apparatus for handling semiconductor wafersExpiredMay 18, 88Mar 13, 90[B65H]
4898471 Particle detection on patterned wafers and the likeExpiredSep 19, 88Feb 06, 90[G01B]
4899055 Thin film thickness measuring methodExpiredMay 12, 88Feb 06, 90[G01N]

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