THERMA-WAVE, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 48158
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 4537
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS3366
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 9438
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 5357
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 4155
 
  
 
G02F DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS 3130
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 3195
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 2203
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 2109

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7747424 Scatterometry multi-structure shape definition with multi-periodicityMar 08, 07Jun 29, 10[G06F]
7567351 High resolution monitoring of CD variationsJan 24, 07Jul 28, 09[G01N, G01B]
7499168 Combined modulated optical reflectance and electrical system for ultra-shallow junctions applicationsJan 23, 07Mar 03, 09[G01N]
7478019 Multiple tool and structure analysisJan 26, 05Jan 13, 09[G06F]
7403022 Method for measuring peak carrier concentration in ultra-shallow junctionsJan 19, 06Jul 22, 08[G01R]
7280215 Photothermal system with spectroscopic pump and probeSep 23, 04Oct 09, 07[G01N]
7251036 Beam splitter/combiner for optical metrology toolJan 19, 06Jul 31, 07[G01N]
7248367 Characterization of ultra shallow junctions in semiconductor wafersMar 08, 04Jul 24, 07[G01N]
7248375 Critical dimension analysis with simultaneous multiple angle of incidence measurementsSep 21, 05Jul 24, 07[G01B]
7239390 Modulated scatterometryMar 24, 05Jul 03, 07[G01J]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7342661 Method for noise improvement in ellipsometersExpiredNov 28, 05Mar 11, 08[G01J]
7330260 Method for measuring ion-implanted semiconductors with improved repeatabilityExpiredFeb 28, 05Feb 12, 08[G01J]
2007/0121,104 Techniques for reducing optical noise in metrology systemsAbandonedApr 13, 04May 31, 07[G01N]
2007/0076,976 Methods for eliminating artifacts in two-dimensional optical metrologyAbandonedAug 04, 06Apr 05, 07[G06K]
6989896 Standardized sample for characterizing the performance of a scatterometerExpiredOct 09, 02Jan 24, 06[G01J]
6982567 Combination optical and electrical metrology apparatusExpiredMay 11, 04Jan 03, 06[G01R]
6963401 Combination thermal wave and optical spectroscopy measurement systemsExpiredOct 22, 03Nov 08, 05[G01J]
6952258 Wafer chuck with integrated reference sampleExpiredMay 11, 04Oct 04, 05[G01N]
6952261 System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot sizeExpiredMar 31, 03Oct 04, 05[G01J]
6940596 Refractive focusing element for spectroscopic ellipsometryExpiredOct 18, 04Sep 06, 05[0000]
6934025 Thin film optical measurement system and method with calibrating ellipsometerExpiredMay 05, 04Aug 23, 05[G01J]
6922244 Thin film optical measurement system and method with calibrating ellipsometerExpiredJun 09, 04Jul 26, 05[G01J]
6917420 Rotational stage with vertical axis adjustmentExpiredJun 08, 04Jul 12, 05[G01B]
6894781 Monitoring temperature and sample characteristics using a rotating compensator ellipsometerExpiredMay 06, 03May 17, 05[G01J]
6885019 Sample positioning system to improve edge measurementsExpiredJan 28, 04Apr 26, 05[G01N]
6870621 Small spot ellipsometerExpiredMar 26, 04Mar 22, 05[G01J]
6867870 Digital detector data communication in an optical metrology toolExpiredOct 02, 02Mar 15, 05[G01B]
2004/0253,751 Photothermal ultra-shallow junction monitoring system with UV pumpAbandonedJun 03, 04Dec 16, 04[H01L, G01J, G01R, G01B]
6829049 Small spot spectroscopic ellipsometer with refractive focusingExpiredMay 03, 01Dec 07, 04[G01J]
6784991 Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometersExpiredJun 17, 02Aug 31, 04[G01N]

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