Tokyo Denshi Kagaku Co., Ltd.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
4790262 Thin-film coating apparatusExpiredOct 01, 86Dec 13, 88[B05C]
D291413 Wafer holding frameExpiredJan 08, 85Aug 18, 87[]
4577165 High-frequency oscillator with power amplifier and automatic power controlExpiredFeb 16, 84Mar 18, 86[H03L, H03B]
4542710 Solution-dropping nozzle deviceExpiredAug 26, 83Sep 24, 85[B05C]
4474642 Method for pattern-wise etching of a metallic coating filmExpiredJul 18, 83Oct 02, 84[C03C, C23F, B44C]
4465553 Method for dry etching of a substrate surfaceExpiredNov 15, 83Aug 14, 84[H01L, C03C, B44C]

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