Tokyo Electron Co., Ltd.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359
 
  
 
B32B LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM2155
 
  
 
H02N ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR130

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6884516 Internal member for plasma-treating vessel and method of producing the sameMay 21, 04Apr 26, 05[H01L, B32B]
6783863 Plasma processing container internal member and production method thereofAug 03, 01Aug 31, 04[H01L, B32B]
6771483 Electrostatic chuck member and method of producing the sameJul 19, 02Aug 03, 04[H01L, H02N]

Expired/Abandoned/Withdrawn Patents

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Top Inventors for This Owner

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