TOKYO ELECTRON KYUSHU LIMITED

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 144
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157
 
  
 
G01V GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS 179

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5374312 Liquid coating systemNov 01, 93Dec 20, 94[B05C]
5252137 System and method for applying a liquidSep 12, 91Oct 12, 93[B08B]
5239182 Wafer conveyor apparatus and method for detecting inclination of wafer inside cassetteApr 16, 92Aug 24, 93[G01V]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5405443 Substrates processing deviceExpiredApr 23, 93Apr 11, 95[B05C]
D341418 Supply nozzle for applying liquid resist to a semiconductor waferExpiredAug 21, 91Nov 16, 93[]

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