ULVAC COATING CORPORATION
Patent Owner
Stats
- 19 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jul 10, 2012 most recent publication
Details
- 19 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 353 Total Citation Count
- Nov 22, 1993 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8216745 Half-tone mask, half-tone mask blank and method for manufacturing half-tone maskOct 29, 08Jul 10, 12[G06F]
7063922 Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofNov 14, 03Jun 20, 06[G01F]
7001698 Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofNov 14, 03Feb 21, 06[G03F]
6689515 Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blankMar 15, 01Feb 10, 04[G03F]
6685848 METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HALF-TONE PHASE-SHIFT PHOTOMASKS AND METHOD FOR THE PREPARATION THEREOF AND SEMICONDUCTOR CIRCUITS AND METHOD FOR THE FABRICATION THEREOFJul 27, 99Feb 03, 04[C23F]
6569577 Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devicesNov 03, 00May 27, 03[G03F]
6288457 Key switch device and portable key electronic device provided with the key switch deviceSep 08, 99Sep 11, 01[H01H]
6228541 Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blankApr 16, 99May 08, 01[G03F, B32B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2010/0273,098 MASK BLANK, PRODUCTION METHOD OF MASK BLANK AND PRODUCTION METHOD OF MASKAbandonedDec 22, 08Oct 28, 10[G03F]
2004/0094,504 Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofAbandonedNov 14, 03May 20, 04[C23F, B44C]
2003/0183,599 High selective ratio and high and uniform plasma processing method and systemAbandonedMar 21, 03Oct 02, 03[C03C]
2002/0155,723 Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofAbandonedMar 28, 02Oct 24, 02[H01L, C23F]
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