VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 30614
 
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 265158
 
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 6539
 
 
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 558
 
 
 
C30B SINGLE-CRYSTAL GROWTH 1937
 
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 1620
 
 
 
H02H EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS 1661
 
 
 
H05H PLASMA TECHNIQUE 1515
 
 
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 1147
 
 
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 1156

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0247,810 SYSTEM FOR MEASURING MATERIAL THICKNESSES AT HIGH TEMPERATURESOct 16, 15Aug 31, 17[G01N, C30B]
2017/0173,799 SELF-DAMPING END EFFECTORDec 22, 15Jun 22, 17[H01L, B25J]
2017/0178,857 Temperature Controlled Ion SourceDec 22, 15Jun 22, 17[H01J]
2017/0178,866 APPARATUS AND TECHNIQUES FOR TIME MODULATED EXTRACTION OF AN ION BEAMDec 22, 15Jun 22, 17[C23C, H01J]
2017/0157,909 PLANAR END EFFECTOR AND METHOD OF MAKING A PLANAR END EFFECTORFeb 24, 17Jun 08, 17[B32B, B25J]
2017/0140,956 Single Piece Ceramic PlatenNov 13, 15May 18, 17[H01L, B28B]
2017/0092,473 IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS HAVING VARIED GEOMETRIESSep 28, 15Mar 30, 17[H01J, H01L]
2017/0032,927 High Brightness Ion Beam ExtractionJul 27, 15Feb 02, 17[H01J]
2017/0005,013 Workpiece Processing TechniqueJun 30, 15Jan 05, 17[H01L]
2016/0379,844 TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHINGSep 13, 16Dec 29, 16[C23F, H01J, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9922795 High brightness ion beam extraction using bias electrodes and magnets proximate the extraction apertureJul 27, 15Mar 20, 18[H01J]
9916966 Apparatus and method for minimizing thermal distortion in electrodes used with ion sourcesJan 26, 17Mar 13, 18[H01J]
9911910 High temperature superconductor tape with alloy metal coatingAug 29, 13Mar 06, 18[H01B, H01L]
9912148 Superconducting fault current limiter systemMar 15, 13Mar 06, 18[H02H, H01L]
9905396 Curved post scan electrodeOct 18, 16Feb 27, 18[G21K, H01J]
9905398 System and tool for manipulating insertApr 17, 17Feb 27, 18[H01J]
9899188 Selective processing of a workpiece using ion beam implantation and workpiece rotationJul 23, 15Feb 20, 18[C23C, H01J, H01L]
9899193 RF ion source with dynamic volume controlNov 02, 16Feb 20, 18[H01J]
9899242 Device and method for substrate heating during transportApr 06, 15Feb 20, 18[F27D, F27B, H01L]
9891599 Proportional integral derivative control incorporating multiple actuatorsFeb 01, 16Feb 13, 18[G05B, G06F, B25J]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0002,784 METHOD AND APPARATUS FOR DEPOSITING A MONOLAYER ON A THREE DIMENSIONAL STRUCTUREAbandonedJul 07, 14Jan 07, 16[C23C]
2015/0290,815 PLANAR END EFFECTOR AND METHOD OF MAKING A PLANAR END EFFECTORAbandonedApr 11, 14Oct 15, 15[B32B, H01L, B25J]
2015/0270,421 Advanced Back Contact Solar CellsAbandonedMar 20, 14Sep 24, 15[H01L]
2015/0228,445 METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATIONAbandonedFeb 13, 14Aug 13, 15[H01J]
2015/0214,339 TECHNIQUES FOR ION IMPLANTATION OF NARROW SEMICONDUCTOR STRUCTURESAbandonedJan 24, 14Jul 30, 15[H01L]
2015/0144,810 TRIPLE MODE ELECTROSTATIC COLLIMATORAbandonedNov 27, 13May 28, 15[G21K]
2015/0062,772 Barrier Layer For Electrostatic ChucksAbandonedAug 27, 13Mar 05, 15[H01L]
2015/0034,837 LIFETIME ION SOURCEAbandonedAug 01, 13Feb 05, 15[H01J]
2014/0352,769 Edge Counter-Doped Solar Cell With Low Breakdown VoltageAbandonedMay 29, 13Dec 04, 14[H01L]
2014/0342,471 Variable Doping Of Solar CellsAbandonedMay 20, 13Nov 20, 14[H01L]
2014/0265,394 COMPOSITE END EFFECTORSAbandonedMar 07, 14Sep 18, 14[H01L, B25J]
2014/0272,181 APPARATUS AND METHOD FOR ION IMPLANTATION IN A MAGNETIC FIELDAbandonedMar 14, 13Sep 18, 14[G11B]
2014/0273,330 METHOD OF FORMING SINGLE SIDE TEXTURED SEMICONDUCTOR WORKPIECESAbandonedMar 12, 13Sep 18, 14[H01L]
2014/0252,787 Venturi Assisted GripperAbandonedMay 19, 14Sep 11, 14[H01L, B25J]
2014/0241,848 ELECTRIC SWITCHABLE MAGNET SLITVALVEAbandonedFeb 25, 13Aug 28, 14[E06B, H01L]
2014/0216,537 METALLIZATION PROCESS FOR SOLAR CELLSAbandonedFeb 07, 13Aug 07, 14[H01L]
2014/0193,963 Techniques For Forming 3D StructuresAbandonedMar 13, 14Jul 10, 14[H01L]
2014/0169,402 TEMPERATURE MONITOR FOR DEVICES IN AN ION IMPLANT APPARATUSAbandonedDec 10, 13Jun 19, 14[C23C, G01B, G01N]
2014/0165,906 MAGNETIC MASKS FOR AN ION IMPLANT APPARATUSAbandonedDec 11, 13Jun 19, 14[C23C]
2014/0154,834 USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTUREAbandonedMay 09, 13Jun 05, 14[H01L]

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