VEECO METROLOGY INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS693
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 2126
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 177
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1205
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7864327 In-phase/in-quadrature demodulator for spectral information of interference signalJan 09, 09Jan 04, 11[G01J, G01B]
5496999 Scanning probe microscopeOct 11, 94Mar 05, 96[H01J]
5237859 Atomic force microscopeMay 30, 91Aug 24, 93[G01B]
5189906 Compact atomic force microscopeApr 19, 91Mar 02, 93[G01B]
5173746 Method for rapid, accurate measurement of step heights between dissimilar materialsMay 21, 91Dec 22, 92[G01B]
5172002 Optical position sensor for scanning probe microscopesAug 22, 91Dec 15, 92[G01J, G01N]
5157251 Scanning force microscope having aligning and adjusting meansMar 13, 91Oct 20, 92[H01J]
5133601 Rough surface profiler and methodJun 12, 91Jul 28, 92[G01B]
5129724 Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sampleJan 29, 91Jul 14, 92[G01B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2008/0006,083 APPARATUS AND METHOD OF TRANSPORTING AND LOADING PROBE DEVICES OF A METROLOGY INSTRUMENTAbandonedJun 26, 06Jan 10, 08[G01B]
7001785 Capacitance probe for thin dielectric film characterizationExpiredDec 06, 04Feb 21, 06[H01L]
5229606 Jumping probe microscopeExpiredJun 05, 89Jul 20, 93[H01J]
5202004 Scanning electrochemical microscopyExpiredDec 20, 89Apr 13, 93[G01N]
5122648 Apparatus and method for automatically focusing an interference microscopeExpiredJun 01, 90Jun 16, 92[H01J]
5103095 Scanning probe microscope employing adjustable tilt and unitary headExpiredMay 23, 90Apr 07, 92[G21K]
5081390 Method of operating a scanning probe microscope to improve drift characteristicsExpiredAug 13, 90Jan 14, 92[H01L]
5077473 Drift compensation for scanning probe microscopes using an enhanced probe positioning systemExpiredJul 26, 90Dec 31, 91[H01J]
5064286 Optical alignment system utilizing alignment spot produced by image inverterExpiredMay 31, 90Nov 12, 91[G01B]
5051646 Method of driving a piezoelectric scanner linearly with timeExpiredNov 29, 90Sep 24, 91[H01L]
5042949 Optical profiler for films and substratesExpiredMar 17, 89Aug 27, 91[G01B]
5025658 Compact atomic force microscopeExpiredNov 28, 89Jun 25, 91[G01B]
4999494 System for scanning large sample areas with a scanning probe microscopeExpiredSep 11, 89Mar 12, 91[G21K]
4955719 Interferometer with thin absorbing beam equalizing pellicleExpiredDec 09, 88Sep 11, 90[G01B]
4954704 Method to increase the speed of a scanning probe microscopeExpiredDec 04, 89Sep 04, 90[H01J]
4931630 Apparatus and method for automatically focusing an interference microscopeExpiredApr 04, 89Jun 05, 90[G01J, G02B]
4889988 Feedback control for scanning tunnel microscopesExpiredJul 06, 88Dec 26, 89[H01J]
4884003 Compact micromotion translatorExpiredDec 28, 88Nov 28, 89[H01L]
4871938 Positioning device for a scanning tunneling microscopeExpiredJun 13, 88Oct 03, 89[H01L]
4832489 Two-wavelength phase-shifting interferometer and methodExpiredMar 19, 86May 23, 89[G01B]

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