VISTEC SEMICONDUCTOR SYSTEMS GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 24182
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS2376
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 5193
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 4201
 
  
 
H04N PICTORIAL COMMUNICATION, e.g. TELEVISION 4238
 
  
 
G01V GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS 278
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 295
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 2445
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
F16H GEARING199

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8390927 Element for homogenizing the illumination with simultaneous setting of the polarization degreeMay 27, 08Mar 05, 13[G02B]
8351049 Interferometric device for position measurement and coordinate measuring machineJul 07, 09Jan 08, 13[G01B]
8264534 Method and apparatus for processing the image data of the surface of a wafer recorded by at least one cameraDec 04, 08Sep 11, 12[H04N]
8200004 Method for inspecting a surface of a wafer with regions of different detection sensitivityDec 09, 08Jun 12, 12[H04N, G01N, G06F, G06K, G01V]
8154595 Device and method for automatic detection of incorrect measurements by means of quality factorsJan 31, 08Apr 10, 12[H04N, G01B, G06K]
8154718 Apparatus and method for inspecting micro-structured devices on a semiconductor substrateMay 23, 05Apr 10, 12[G01N]
8149383 Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topologyJul 21, 08Apr 03, 12[G03B]
8115808 Coordinate measuring machine and method for calibrating the coordinate measuring machineJun 25, 08Feb 14, 12[H04N]
8102541 Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structuresJan 15, 08Jan 24, 12[G01B]
8087799 Illumination means and inspection means having an illumination meansSep 29, 08Jan 03, 12[F21V]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
8248618 Method for determining positions of structures on a maskExpiredJan 19, 10Aug 21, 12[G06F, G01B]
8200003 Method for the optical inspection and visualization of optical measuring values obtained from disk-like objectsExpiredAug 14, 08Jun 12, 12[G06K]
8125653 Apparatus and method for the determination of the position of a disk-shaped objectExpiredSep 09, 09Feb 28, 12[G01B]
2012/0033,230 Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the DeviceAbandonedFeb 09, 11Feb 09, 12[G01B]
2012/0033,691 Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the DeviceAbandonedFeb 09, 11Feb 09, 12[F21V, H01S]
7978340 System and method for determining positions of structures on a substrateExpiredJul 31, 08Jul 12, 11[G08B, G01B]
2010/0060,883 Apparatus and method for determining the focus positionAbandonedSep 08, 09Mar 11, 10[G01M]
2009/0316,981 Method and device for inspecting a disk-shaped objectAbandonedJun 12, 09Dec 24, 09[G06K]
2009/0309,285 Device for holding disk-shaped objectsAbandonedJun 04, 09Dec 17, 09[B23Q]
2009/0279,080 DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION OF A WAFERAbandonedJun 30, 09Nov 12, 09[G01N]
2009/0237,653 DEVICE FOR RECORDING A NUMBER OF IMAGES OF DISK-SHAPED OBJECTSAbandonedSep 29, 06Sep 24, 09[G01N]
2009/0225,414 Dark Field Objective for a MicroscopeAbandonedSep 24, 06Sep 10, 09[G02B]
7561984 Method for calculating a model spectrumExpiredJan 22, 07Jul 14, 09[G06F]
2009/0153,875 COORDINATE MEASURING MACHINE WITH TEMPERATURE ADAPTING STATIONAbandonedAug 25, 08Jun 18, 09[F28D, G01B]
2009/0126,525 Apparatus and method for supporting a substrate at a position with high precisionAbandonedSep 30, 08May 21, 09[G12B]
2009/0073,458 MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELEMENTS OF A COORDINATE MEASURING MACHINEAbandonedAug 18, 08Mar 19, 09[G01P, G01B]
2009/0066,970 Arrangement and method for improving the measurement accuracy in the nm range for optical systemsAbandonedMay 20, 08Mar 12, 09[G01B]
2009/0051,932 METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN THE Z-COORDINATE DIRECTION OF AN OPTICAL MEASURING MACHINE HAVING MAXIMUM REPRODUCIBILITY OF MEASURED STRUCTURE WIDTHSAbandonedAug 18, 08Feb 26, 09[G01B]
2009/0034,832 Device and method for scanning the whole surface of a waferAbandonedJul 25, 08Feb 05, 09[G06K]
2009/0015,833 DEVICE AND METHOD FOR IMPROVING THE MEASUREMENT ACCURACY IN AN OPTICAL CD MEASUREMENT SYSTEMAbandonedMay 27, 08Jan 15, 09[G01J, G01B]

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