Z CAP, L.L.C.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6641675 Method and apparatus for immersion treatment of semiconductor and other devicesExpiredMay 25, 01Nov 04, 03[B08B]
6415803 Method and apparatus for semiconductor wafer cleaning with reuse of chemicalsExpiredNov 05, 99Jul 09, 02[B08B]
6284055 Method and apparatus for immersion treatment of semiconductor and other devicesExpiredJul 11, 00Sep 04, 01[B08B]
6244280 Method and apparatus for immersion treatment of semiconductor and other devicesExpiredNov 18, 99Jun 12, 01[B08B]
6146468 Semiconductor wafer treatmentExpiredMar 05, 99Nov 14, 00[B08B]
6021791 Method and apparatus for immersion cleaning of semiconductor devicesExpiredJun 29, 98Feb 08, 00[B08B]

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