Zetetic Institute

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS297

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6091496 Multiple layer, multiple track optical disk access by confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensationJun 02, 98Jul 18, 00[G01B]
5760901 Method and apparatus for confocal interference microscopy with background amplitude reduction and compensationJan 28, 97Jun 02, 98[G01B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7646490 Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase shifting point-diffraction interferometryExpiredJul 25, 07Jan 12, 10[G01B]
7508527 Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometryExpiredApr 10, 06Mar 24, 09[G01B]
7495769 Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometryExpiredJan 31, 08Feb 24, 09[G01B]
7460245 Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometryExpiredAug 24, 06Dec 02, 08[G01N]
7428058 Apparatus and method for in situ and ex situ measurements of optical system flareExpiredMay 15, 06Sep 23, 08[G01B]
7405832 Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometryExpiredAug 08, 06Jul 29, 08[G01B]
7355722 Catoptric and catadioptric imaging systems with adaptive catoptric surfacesExpiredSep 10, 04Apr 08, 08[G01B]
7345771 Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masksExpiredMay 06, 05Mar 18, 08[G01B]
7324209 Apparatus and method for ellipsometric measurements with high spatial resolutionExpiredJul 07, 04Jan 29, 08[G01B]
7324216 Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafersExpiredAug 19, 05Jan 29, 08[G01B]
7312877 Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopyExpiredSep 30, 04Dec 25, 07[G01B]
7298496 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometryExpiredMay 23, 05Nov 20, 07[G01B]
7263259 Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavitiesExpiredFeb 06, 04Aug 28, 07[G02B]
2007/0121,115 Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometryAbandonedNov 15, 06May 31, 07[G01B]
7180604 Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfacesExpiredSep 21, 05Feb 20, 07[G02B]
2007/0014,319 Continuously Tunable External Cavity Diode Laser Sources With High Tuning And Switching Rates And Extended Tuning RangesAbandonedJul 12, 06Jan 18, 07[H01S]
7164480 Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopyExpiredFeb 04, 04Jan 16, 07[G01B]
7161680 Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometryExpiredAug 16, 05Jan 09, 07[G01B]
7145663 Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfacesExpiredSep 16, 05Dec 05, 06[G01B]
7133139 Longitudinal differential interferometric confocal microscopyExpiredFeb 19, 04Nov 07, 06[G01B]

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