Ching-Hsing Chang

Inventor

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Work History

Patent OwnerApplications FiledYear
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
1
2002

Inventor Addresses

AddressDuration
Hsin-chu, TWDec 09, 03 - Dec 09, 03

Technology Profile

Technology # of Patents
H01L: SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
6,660,6532003Dual trench alternating phase shift mask fabrication9

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