Device for measuring the vibrational amplitude of a capillary tube of a wire bonder

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United States of America Patent

PATENT NO 10048114
APP PUB NO 20170016760A1
SERIAL NO

15124159

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Abstract

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In a device for measuring the vibrational amplitude of a capillary tube of a wire bonder, the capillary tube is placed between a light source and a detector system, so that the vibrational amplitude is able to be ascertained from the shading of a beam of light by the capillary tube. The beam of light emitted by the light source is split into a measuring beam of light and a reference beam of light, an edge of the capillary tube at least partially shading the measuring beam of light in the vibrating state, while the reference beam of light is not shaded. The detector system includes a measuring detector assigned to the measuring beam of light as well as at least one reference detector assigned to the reference beam of light, and the vibrational amplitude of the capillary tube is ascertainable from the interconnected output signals of the measuring detector and the reference detector.

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Patent Owner(s)

Patent OwnerAddress
DR JOHANNES HEIDENHAIN GMBH83301 TRAUNREUT

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Holzapfel, Wolfgang Obing, DE 125 1123
Huber, Walter Traunstein, DE 57 963

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