Motion sensor integrated nano-probe N/MEMS apparatus, method, and applications

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United States of America Patent

PATENT NO 10048289
APP PUB NO 20140331367A1
SERIAL NO

14364745

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Abstract

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A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

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Patent Owner(s)

  • CORNELL UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amponsah, Kwame Ithaca, US 17 35
Lal, Amit Ithaca, US 93 2222

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