Method for manufacturing electron source
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United States of America Patent
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Sep 11, 2018
Grant Date -
Sep 10, 2015
app pub date -
Oct 12, 2012
filing date -
Oct 12, 2012
priority date (Note) -
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Abstract
A conventional method to process a tip fails to designate the dimension of the shape of the end of the tip, and so fails to obtain a tip having any desired diameter. Impurities may be attached to the tip. Based on a correlation between the voltage applied or the time during processing of the end of the tip and the diameter of the tip end, the applied voltage is controlled so as to obtain a desired diameter of the tip end for processing of the tip. This allows a sharpened tip made of a tungsten monocrystal thin wire to be manufactured to have any desired diameter in the range of 0.1 μm or more and 2.0 μm or less.
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