Variable gap hard stop design

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United States of America Patent

PATENT NO 10087525
APP PUB NO 20170040206A1
SERIAL NO

14817953

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reaction system for processing semiconductor substrates is disclosed. The reaction system includes a susceptor for holding the substrate as well as a baseplate as a part of housing for the reaction system. A pin located on the susceptor can interact with a baseplate feature located on the baseplate to result in a variable gap between the susceptor and the baseplate. The baseplate feature may take the form of a series of steps, a wedge, or a milled-out feature.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schmotzer, Michael Scottsdale, US 7 1018
Whaley, Shawn Chandler, US 2 684

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