Developing method, developing apparatus, and storage medium
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United States of America Patent
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Oct 23, 2018
Grant Date -
Oct 4, 2018
app pub date -
Mar 27, 2018
filing date -
Mar 30, 2017
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A developing method includes: horizontally holding a substrate; disposing an opposing surface of a developer nozzle that faces a portion of a surface of the substrate, above one of central and peripheral portions of the surface; discharging a developer to form a liquid collection portion of the developer; spreading the liquid collection portion by moving the developer nozzle toward the other of the central and peripheral portions with the opposing surface brought into contact with the liquid collection portion; lifting the developer nozzle relative to the surface while stopping the discharge of the developer, and pulling up a portion of the liquid collection portion; stopping the lifting, and forming a pillar of the developer having a tapered upper end which is brought into contact with the opposing surface; and applying a shearing force to the pillar to shear the tapered upper end and separating the pillar from the opposing surface.
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