Three-dimensional fine movement device

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United States of America Patent

PATENT NO 10161958
APP PUB NO 20160011231A1
SERIAL NO

14794968

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.

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Patent Owner(s)

  • HITACHI HIGH-TECH SCIENCE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shigeno, Masatsugu Tokyo, JP 28 138
Watanabe, Kazutoshi Tokyo, JP 114 854
Watanabe, Masafumi Tokyo, JP 67 585

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