Methods for fabricating apparatus having a hermetic seal

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United States of America Patent

PATENT NO 10168191
APP PUB NO 20150343575A1
SERIAL NO

14821459

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Abstract

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Apparatus and Methods for fabricating apparatus having a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.

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Patent Owner(s)

Patent OwnerAddress
ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO LTDSHAOXING ZHEJIANG 311835

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nguyen, Tom T San Jose, US 18 102

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