Apparatus and methods for investigating a sample surface

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United States of America Patent

PATENT NO 10168353
APP PUB NO 20180149673A1
SERIAL NO

15575348

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Abstract

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An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

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Patent Owner(s)

  • NANYANG TECHNOLOGICAL UNIVERSITY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huo, Fengwei Singapore, SG 10 65
Wu, Jin Singapore, SG 523 2567

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