Supply method for liquid and supply apparatus
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United States of America Patent
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Jan 15, 2019
Grant Date -
Aug 21, 2014
app pub date -
Feb 18, 2014
filing date -
Feb 20, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A solution having a predetermined concentration is stably supplied to a use point, at which the amount of use of the solution changes, by only modifying currently-used equipment at a low cost and in a space-saving manner. In order to supply a solution containing a solute at a predetermined concentration from a preparation portion of the solution to a use point through a supply pipe, a retention portion that has no gas-liquid interface and at which the solution is retained is provided at an intermediate portion of the supply pipe. Even when the amount of use of the solution at the use point changes, the change is absorbed by the retention portion, whereby a solution having a predetermined concentration can be stably supplied to the use point.
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