Lapping pads and systems and methods of making and using the same
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United States of America Patent
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Feb 5, 2019
Grant Date -
Feb 15, 2018
app pub date -
Aug 11, 2016
filing date -
Aug 11, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present disclosure relates to lapping pads which include an abrading layer, wherein the abrading layer includes a working surface and a second surface opposite the working surface having a projected area Ap, and at least one cavity having a cavity opening located at the second surface, the at least one cavity being defined by at least one rib, each rib having a distal end at the second surface; and a phase transition material having a thermally reversible phase transition, wherein the phase transition material is disposed in the at least one cavity. The present disclosure further relates to a lapping system, the lapping system includes a lapping pad of the present disclosure and a working fluid; a method of making a lapping pad; and a method of lapping using a lapping pad of the present disclosure.
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