Dual-probe scanning probe microscope

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United States of America Patent

PATENT NO 10197595
APP PUB NO 20160274143A1
SERIAL NO

15077599

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Abstract

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An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

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Patent Owner(s)

  • BRUKER NANO, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Su, Chanmin Ventura, US 61 692

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