Apparatuses and methods for gas mixed liquid polishing, etching, and cleaning

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United States of America Patent

PATENT NO 10204804
APP PUB NO 20140374023A1
SERIAL NO

14481725

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Abstract

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In accordance with an embodiment of the present invention, a method of polishing a device includes providing a layer having a non-uniform top surface. The non-uniform top surface includes a plurality of protrusions. The method further includes removing the plurality of protrusions by exposing the layer to a fluid that has gas bubbles and a liquid.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kosub, Johann Neutraubling, DE 4 19

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