Heat treatment apparatus, heat treatment method, and storage medium
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United States of America Patent
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Feb 26, 2019
Grant Date -
Jun 16, 2016
app pub date -
Dec 3, 2015
filing date -
Dec 10, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed is a heat treatment apparatus for performing a heat treatment on a coating film formed on a substrate. The apparatus includes a placing unit provided within a processing container, and configured to place the substrate thereon; a heating unit configured to heat the substrate placed on the placing unit; a gas supply port provided along a circumferential direction outside the substrate on the placing unit in a plan view, and configured to supply gas into the processing container; an outer circumferential exhaust port provided along the circumferential direction outside the substrate on the placing unit in a plan view, and configured to exhaust an inside of the processing container; and a central exhaust port provided above a central portion of the substrate on the placing unit, and configured to exhaust the inside of the processing container.
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