Method for making pine shaped metal nano-scaled grating
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United States of America Patent
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Apr 23, 2019
Grant Date -
Nov 1, 2018
app pub date -
Dec 22, 2017
filing date -
Apr 27, 2017
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Abstract
A method of making a pine shaped metal nano-scaled grating, the method including: forming a first metal layer on a substrate, forming an isolation layer on the first metal layer, and locating a second metal layer on the isolation layer; placing a first mask layer on the second metal layer, wherein the first mask layer comprises a body, and the body defines a plurality of openings parallel with and spaced apart from each other; etching the first mask layer and the second metal layer to obtain a plurality of triangular prism structures; etching the isolation layer to obtain a plurality of second rectangular structures using the plurality of triangular prism structures as a first mask; and etching the first metal layer to obtain a plurality of first rectangular structures using the plurality of second rectangular structures as a second mask.
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