Accelerometers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10274511
APP PUB NO 20160334439A1
SERIAL NO

15107118

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitive accelerometer including: at least one additional fixed capacitor electrode with a plurality of additional fixed capacitive electrode fingers extending along the sensing direction. The proof mass comprises a plurality of moveable capacitive electrode fingers extending from the proof mass along the sensing direction and arranged to interdigitate with the plurality of additional fixed capacitive electrode fingers of the at least one additional fixed capacitor electrode. A means is provided for applying a voltage to the at least one additional fixed capacitor electrode to apply an electrostatic force to the plurality of moveable capacitive electrode fingers that acts to pull the proof mass towards the at least one further fixed capacitor electrode and thereby reduces the lateral spacings between the movable capacitive electrode fingers of the proof mass and the first and second sets of fixed capacitive electrode fingers that provide electrostatic forces for sensing purposes.

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Patent Owner(s)

Patent OwnerAddress
ATLANTIC INERTIAL SYSTEMS LIMITEDPLYMOUTH DEVON PL6 6DE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Malvern, Alan Plymouth, GB 15 49

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