Cryopump system, method of operating the same, and compressor unit
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United States of America Patent
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May 7, 2019
Grant Date -
Sep 18, 2014
app pub date -
Mar 12, 2014
filing date -
Mar 12, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A cryopump system includes a cryopump, a compressor of a working gas for the cryopump, a control device configured to control an operation frequency of the compressor, a gas line connecting the cryopump and the compressor, and a gas quantity adjustment unit configured to switch a working gas quantity of the gas line between at least a first gas quantity and a second gas quantity. When the gas line has the first gas quantity, a controllable range of the operation frequency provides a first flow rate range of the working gas. When the gas line has the second gas quantity, the controllable range provides a second flow rate range of the working gas. The second flow rate range has a non-overlapping portion with the first flow rate range.
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