Micromechanical sensor and method for producing a micromechanical sensor

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United States of America Patent

PATENT NO 10294095
APP PUB NO 20170341927A1
SERIAL NO

15582333

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Abstract

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A micromechanical sensor that is produced surface-micromechanically includes at least one mass element formed in a third functional layer that is non-perforated at least in certain portions. The sensor has a gap underneath the mass element that is formed by removal of a second functional layer and at least one oxide layer. The removal of the at least one oxide layer takes place by introducing a gaseous etching medium into a defined number of etching channels arranged substantially parallel to one another. The etching channels are configured to be connected to a vertical access channel in the third functional layer.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Classen, Johannes Reutlingen, DE 106 787
Pekka, Herzogenrath Benny Stuttgart, DE 2 4

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