Ale smoothness: in and outside semiconductor industry

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10304659
APP PUB NO 20180233325A1
SERIAL NO

15952834

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Abstract

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Methods of etching and smoothening films by exposing to a halogen-containing plasma and an inert plasma within a bias window in cycles are provided. Methods are suitable for etching and smoothening films of various materials in the semiconductor industry and are also applicable to applications in optics and other industries.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATIONFREMONT CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanarik, Keren Jacobs Los Altos, US 36 2409
Lill, Thorsten Santa Clara, US 101 3753
Marks, Jeffrey Saratoga, US 108 5192
Pan, Yang Los Altos, US 310 4868
Shen, Meihua Fremont, US 71 2612
Tan, Samantha Fremont, US 49 3743
Wise, Richard Los Gatos, US 74 1883

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