Vacuum-processing device and control method therefor, and vacuum soldering device and control method therefor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10307849
APP PUB NO 20170282270A1
SERIAL NO

15507906

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.

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Patent Owner(s)

  • SENJU METAL INDUSTRY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kagaya, Tomotake Chiba, JP 5 25

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