Vacuum-processing device and control method therefor, and vacuum soldering device and control method therefor

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United States of America Patent

PATENT NO 10307849
APP PUB NO 20170282270A1
SERIAL NO

15507906

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.

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Patent Owner(s)

  • SENJU METAL INDUSTRY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kagaya, Tomotake Chiba, JP 5 33

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