Flow passage structure, intake and exhaust member, and processing apparatus
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United States of America Patent
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Jun 4, 2019
Grant Date -
Dec 28, 2017
app pub date -
Sep 10, 2015
filing date -
Mar 18, 2015
priority date (Note) -
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Abstract
A flow passage structure includes a member. The member includes a plurality of first openings, a plurality of second openings, a flow passage, and a plurality of joining and branching parts. The flow passage connects the first openings with the second openings. The joining and branching parts are provided in the flow passage and each have a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other. The second parts are closer to the second openings than the first parts are, in a path between the first opening and the second opening. The first ends are connected with the second ends in each joining and branching part.
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