Semiconductor treatment composition and treatment method

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United States of America Patent

PATENT NO 10319605
APP PUB NO 20170330763A1
SERIAL NO

15584168

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Abstract

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A semiconductor treatment composition includes particles having a particle size of 0.1 to 0.3 micrometers in a number of 3×101 to 1.5×103 per mL.

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Patent Owner(s)

  • JSR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayama, Takahiro Minato-ku, JP 16 50
Kamei, Yasutaka Minato-ku, JP 10 19
Kamo, Satoshi Minato-ku, JP 19 69
Nishiguchi, Naoki Minato-ku, JP 89 762
Shinoda, Tomotaka Minato-ku, JP 26 173

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